CAPACITANCE MANOMETER HAVING A RELATIVELY THICK FLUSH DIAPHRAGM UNDER TENSION TO PROVIDE LOW HYSTERESIS
摘要
A capacitance diaphragm gauge (100) for measuring pressure includes a flush diaphragm (120) mounted to a body structure (110) via a shim (122) or other raised perimeter portion.
申请公布号
WO2004086457(A3)
申请公布日期
2005.03.24
申请号
WO2004US08351
申请日期
2004.03.17
申请人
HORIBA STEC, INC.
发明人
FERRAN, ROBERT, J.;ROHRBACH, DANIEL, M.;OSWALD, MICHAEL
