ACOUSTIC DIFFUSERS FOR ACOUSTIC FIELD UNIFORMITY,申请号WO2004US29577-传众专利搜索

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发明名称	ACOUSTIC DIFFUSERS FOR ACOUSTIC FIELD UNIFORMITY
摘要	<p>Apparatuses and methods for processing semiconductor wafers. In one embodiment, an apparatus includes an immersion processing tank (10) in which one or more wafers (16) are positioned in a processing liquid (18) during a treatment, at least one sound source (22) that is acoustically coupled to the processing liquid (18) and that produces a sound field in the processing liquid (18) contained in the processing tank (10) during a treatment, and a sound diffusing system (28) comprising a plurality of sound diffusing elements positioned in a manner effective to diffuse sound energy transferred from the source (22) to the processing liquid (18). In another embodiment, the sound diffusing system (28) includes at least one directionally phase modulating element positioned in a manner effective to reduce interference of sound energy in the processing liquid (18). Related methods are also described.</p>
申请公布号	WO2005025767(A1)	申请公布日期	2005.03.24
申请号	WO2004US29577	申请日期	2004.09.10
申请人	FSI INTERNATIONAL, INC.;CHRISTENSON, KURT, K.	发明人	CHRISTENSON, KURT, K.
分类号	B08B3/12;G10K11/20;H01L21/00;H03G3/00;(IPC1-7):B08B3/12;B01J19/10	主分类号	B08B3/12
代理机构		代理人
主权项
地址

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