MAGNETIC BEARING DEVICE AND VACUUM PUMP

摘要

A magnetic bearing device (1) for rotatably supporting a shaft (20) for rotation about a rotation axis (101) is dis­closed. The device (1) comprises a first active radial bear­ing (5), one or more first radial displacement sensors (81), and an axial bearing (6, 7). At least a part of the axial bearing (6, 7) is disposed between the first active radial bearing (5) and the first radial displacement sensors (81) if viewed in an orthogonal projection onto the rotation axis (101). Also a vacuum pump comprising such a magnetic bearing device (1) and a multiple-sensing unit (8) are disclosed.