| 摘要 |
PROBLEM TO BE SOLVED: To provide a 3-CCD type solid-state imaging apparatus with an easy assembling method, high resolution and high sensitivity at a low cost. SOLUTION: A photonic crystal 4 acting like a spectroscope element for separating an incident light into groups of red lights, green lights, and blue lights and collimating optical axes of the optical components in the same group is provided, and a red light solid-state imaging element 1, a green light solid-state imaging element 2, and a blue light solid-state imaging element 3 are placed on each optical axis of the groups of the lights separated by the photonic crystal 4. In the photonic crystal 4, Si<SB>3</SB>N<SB>4</SB>(refractive index, 2.0) having a cylindrical shape (radius, 0.113μm) in the Y direction is arranged in a square lattice form (pitch, 0.25μm) in SiO2 (refractive index, 1.45) and 9 layers of Si<SB>3</SB>N<SB>4</SB>are formed in the Z direction (traveling direction of light) and the photonic crystal 4 has a refractive index periodic structure in the X and Z directions. COPYRIGHT: (C)2005,JPO&NCIPI |
