METHOD FOR FORMING REFRACTIVE INDEX PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a chemically stable refractive index pattern, having a relatively large difference in the refractive indices.

SOLUTION: In the method for forming the refractive index pattern, a hybrid material comprising a polysilane compound and an inorganic compound is irradiated with an active energy line via a mask, a polysilane decomposition product of the irradiated part is removed, and then the whole hybrid material is hardened by heating.

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