| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposure device and an exposure system that can prevent the degrading of an optical system or the like provided in the exposure device even if any trouble occurs in the supply of a transparent gas. SOLUTION: A nitrogen gas supply/recovery device 2 supplies a nitrogen gas to a plurality of exposure devices 1. The exposure devices 1 are respectively provided with a nitrogen gas tank 7, and in case when the supply of the nitrogen gas to the exposure device 1 from the nitrogen gas supply/recovery device 2 is stopped due to power failure, the nitrogen gas is supplied to the exposure devices 1 from the nitrogen gas tanks 7. COPYRIGHT: (C)2005,JPO&NCIPI
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