| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an polishing cloth reducing the applied quantity of the polishing cloth required for texture machining, having excellent machining efficiency and less scratch defects, and performing texture machining of high accuracy of 0.3 nm or less on a substrate surface. <P>SOLUTION: This abrasive cloth is formed of a sheet-like material comprising a nonwoven fabric formed by entangling super-fine short fiber bundles of 0.5-4 μm in average fiber diameter, and a polymeric elastic body existing in the internal space, wherein at least one face is formed as a napped surface formed of super-fine fiber. The polymeric elastic body and the fiber located at the outermost periphery of the super-fine fiber bundle are partially joined, and most of the napped fibers of the napped surface is arranged in a state of being linearly arranged in one direction within the napped surface. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
