| 摘要 |
PROBLEM TO BE SOLVED: To provide a wire saw effectively preventing the fall of abrasive grains by optimizing the number of abrasive grains stuck to the wire saw, the spacing of abrasive grains, and eccentricity. SOLUTION: The image of the wire saw with abrasive grains stuck around a core wire with a bond material, is photographed using light transmitted through the wire saw. Based on the lightness of the photographed image of the wire saw, the outlines of the abrasive grains are detected to detect the positions of the abrasive grains. At least the number of abrasive grains, the spacing of the abrasive grains, and the projection area of the abrasive grains are detected to inspect the distributed state of the abrasive grains. Using this inspection method of the wire saw, the wire saw is formed so that the thickness ratio of a thin abrasive grain layer to a thick abrasive grain layer is 0.6 or more on the abrasive grain layers formed on both sides of the core wire, wherein the projection area of the abrasive grains to the projection area of the abrasive grain layer is 20% to 80% and the standard deviation of abrasive grain spacing is 200μm or less. COPYRIGHT: (C)2005,JPO&NCIPI |
