| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel diaphragm pump having improved discharging performance for high coating accuracy. SOLUTION: The diaphragm pump for feeding fluid with high accuracy comprises a diaphragm mounting housing 24 storing the fluid to be fed and having a fluid outlet 11, a vent hole 12 and a fluid inlet 10 and internally shaped into a streamline for preventing the residence of the fluid, a diaphragm membrane 5 arranged in the housing 24 for separating the fed fluid 6 from driving indirect fluid 7 in a sealed condition and controlling the feed of the fed fluid in the housing with a change in the shape, an indirect fluid storage cylinder 4 for storing the indirect fluid for deforming the diaphragm membrane, an indirect fluid moving piston 3 for moving the indirect fluid in the indirect fluid cylinder, and a linear motor 1 having a motor driving shaft connected to the indirect fluid moving piston for driving the linear reciprocation of the piston and controlling it. COPYRIGHT: (C)2005,JPO&NCIPI |
