| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an inkjet head in which a target ink passage can be formed correctly. SOLUTION: The manufacturing method for the inkjet head includes a process of forming a positive resist layer composed of a photo-disintegrative positive resist on a surface of a substrate with energy generating elements, a process of forming a fine structure to be at least an ink passage at the positive resist layer by removing a predetermined region of the positive resist layer through a photolithographic process comprised of an exposure and development process, a process of forming a negative resist layer composed of a negative resist capable of crosslinking between molecules on the surface of the substrate where the fine structure is formed, a process of forming an ink discharge opening at a predetermined part of the negative resist layer, and a process of forming the ink passage which communicates with the ink discharge opening, by removing the fine structure. The positive resist includes a polymer with a glutarimide structure in the molecule. COPYRIGHT: (C)2005,JPO&NCIPI |
