| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer discharge lamp dimmer which enables an excimer discharge lamp to control light stably in a wide range. SOLUTION: In the excimer discharge lamp dimmer which controls light by applying a high frequency voltage of a kHz or higher band to the excimer discharge lamp 8 and varying the frequency of the high frequency voltage, an ON-time per half cycle of the frequency is made to be nearly the same as a time for electric-charging contributing to the light emission of the excimer discharge lamp 8, thereby enabling the stable light control. Further, the high frequency voltage applied to the excimer discharge lamp is modulated by a rectangular wave having a lower frequency than that of the high frequency voltage, thereby enabling the light control in a wider range. COPYRIGHT: (C)2005,JPO&NCIPI |
