INORGANIC THIN FILM ELECTROLUMINESCENT DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

An inorganic thin film electroluminescent device and a manufacturing method thereof are provided to realize insulating films by using a PEALD(Plasma Enhanced Atomic Layer Deposition) method that uses a reaction gas with nitrogen and oxygen, and to use a multilayer insulating film consisting of high dielectric films and low dielectric films, thereby realizing high stability and high performance. At least one of lower insulating films(1200) and upper insulating films(1400) is a multilayer insulating film consisting of low dielectric films(1210,1420) and high dielectric films(1220,1410) contacted with a fluorescent substance(1300). An inorganic thin film electroluminescent device operates by electrons, which are trapped on interfaces of the fluorescent substance(1300) and the insulating films(1200,1400) and are excited while colliding with the fluorescent substance(1300) by being accelerated with electric fields.