发明名称 RUBY CAPILLARY MANUFACTURE METHOD
摘要 A method of manufacturing a ruby capillary is provided to reduce remarkably fraction defective and to enhance the quality by using an ultrasonic apparatus. A ruby part is cut by using a cutting machine and inspected under a fluorescent lamp. A first hole is formed in the ruby part by using an ultrasonic apparatus with a frequency range of 25000 or more number/s. A state of the first hole is checked. First lapping is performed on the first hole by using the ultrasonic apparatus in order to adjust an upper inner diameter of the first hole in a predetermined height range. A second hole forming process is performed on an end of the first hole by using the ultrasonic apparatus.
申请公布号 KR20050027763(A) 申请公布日期 2005.03.21
申请号 KR20030064135 申请日期 2003.09.16
申请人 INSUNG NOZZLE .CO.,LTD. 发明人 KIM, KYUNG HAN
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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