A Device of poly-Si film fabrication by using UV-lamp and A method of as the same,申请号KR20030022769-传众专利搜索

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发明名称	A Device of poly-Si film fabrication by using UV-lamp and A method of as the same
摘要
申请公布号	KR100477214(B1)	申请公布日期	2005.03.21
申请号	KR20030022769	申请日期	2003.04.10
申请人		发明人
分类号	C30B28/06;(IPC1-7):C30B28/06	主分类号	C30B28/06
代理机构		代理人
主权项
地址

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