| 摘要 |
The invention relates to coating roll substrates in vacuum, particularly to the deposition process, which are associated with depositing significant amounts of metals or other materials, causing significant thermal loads on the substrate. Nonmetallic roll materials, polymeric films or thin metal foils can be used as substrate. According to the invention the roll vacuum coating device shown on fig.1 and fig.2, consists of vacuum chamber (1), source of deposited material (2), installed inside the chamber, and rotatable drum (3) with cylindrical pressure rollers (4). Source of deposited material (2) and rotatable drum (3) compose zone (5) inside the vacuum chamber (1) of coating the substrate (6). The device is equipped with the means of the substrate-hold down and transverse spreading as the elastic laces (7) of the specials asymmetrical profile, guide rollers and pressure rollers (9). Shell of drum (3) is equipped with system of holes (10), which are connected with the pipeline (11) of gas introduction. Gas from a relevant source (not shown) is introduced through the said pipeline, gas manifold (12) and holes (10) into gap (13) between the surface of drum (3) and substrate (6). The drum is also provided with pipeline (14) of the liquid coolant introduction into its inside space and with pipeline (15) of the liquid coolant withdrawal. The section of holes (10), which is not covered by substrate (6), can be separated by locks (16) from deposition zone (5) for additional decrease of the load onto the vacuum pumping means. A method offered for coating roll substrates in vacuum is characterized by the step of depositing the coating on the central zone of the substrate width, leaving the substrate edges free from the coating, and by the step of holding down the said free edges of the substrate to the supporting surface of the rotatable drum in the deposition zone in such a manner, that the component of the frictional force of the substrate against the supporting surface provides the force of the substrate transverse spreading to both sides in addition to the lengthwise tension.
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