发明名称 |
APPARATUS AND METHOD FOR DETECTION OF VACUUM ULTRAVIOLET RADIATION |
摘要 |
<p>Vacuum ultraviolet radiation detection apparatus (10) comprises a radiation detector (30) in a chamber (12). The detector (30) receives ultraviolet radiation from a radiation source (36). The chamber is evacuated using a dry vacuum pump (18) to a relatively poor vacuum of no less than 5 Pa. UV transparent gas is supplied from a gas supply (26), into the chamber (12) at a relatively low flow rate (around 0.1 litres/minute) so as to provide an overall pressure in the chamber (12) of between 100 and 1,000 Pa. The use of a relatively inexpensive pump coupled with a lower gas flow rate provides significant cost savings.</p> |
申请公布号 |
WO2005024361(A1) |
申请公布日期 |
2005.03.17 |
申请号 |
WO2004EP09821 |
申请日期 |
2004.09.03 |
申请人 |
THERMO ELECTRON CORPORATION;VINCENT, FRANCOIS;CABRAS, ANTONIO |
发明人 |
VINCENT, FRANCOIS;CABRAS, ANTONIO |
分类号 |
G01J1/42;G01J3/443;(IPC1-7):G01J1/42 |
主分类号 |
G01J1/42 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|