MICROMACHINE AND PRODUCTION METHOD THEREFOR

摘要

A micromachine for use in a high- frequency filter having a high Q value and a higher frequency band. A micromachine (20) characterized by comprising an output electrode (7) provided on a substrate (1), an interlayer insulation film consisting of a first insulation film (9) and a second insulation film (11) provided on the substrate so as to cover the output electrode (7), a hole pattern (11a) provided in the second insulation film (11) so as to reach the output electrode (7), and a band-form vibrator electrode (15) provided on the second insulation film (11) so as to cross the upper part of the hole pattern with the interior of the hole pattern (11a) formed as a hollow (A).