发明名称 |
Semiconductor device identification apparatus |
摘要 |
A three-dimensional image of a semiconductor device identification pattern is obtained by measuring the distance of at least one sensor to the surface of the semiconductor device. The apparatus includes a source of radiation for deriving the distance from properties of the reflected light. A unit for determining the distance and an image processing unit are used to establish the three-dimensional picture. Positional information can be achieved in a scanning movement from motors being controlled by a control unit. By applying a threshold value, a two-dimensional image is derived and by a pattern recognition algorithm, the identification pattern can be analyzed.
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申请公布号 |
US6866200(B2) |
申请公布日期 |
2005.03.15 |
申请号 |
US20040816142 |
申请日期 |
2004.04.02 |
申请人 |
INFINEON TECHNOLOGIES SG300 GMBH & CO. KG |
发明人 |
MARX ECKHARD;PEITER MARTIN |
分类号 |
G01B11/02;G01B11/06;H01L21/00;(IPC1-7):G06K19/06;G06K7/00 |
主分类号 |
G01B11/02 |
代理机构 |
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