| 摘要 |
A vacuum line (10) comprising a vacuum-tight flexible tube section (22) and a vibration damper (16) axially parallel to the flexible tube section (22) serves to connect tow vacuum devices (12, 14). The vibration damper (16) is an actively regulated axial magnetic bearing. Thereby, a vibration damper with good dampening properties is realized. By changing the regulation parameters, the vibration damper is adaptable and not subjected to any mechanical wear. The transmission of structure-borne noise is avoided by the contactless vibration dampening.
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