| 发明名称 |
SYSTEM AND METHOD FOR MASS FLOW DETECTION DEVICE CALIBRATION |
| 摘要 |
A system and method for detecting a fluid flow where a fluid passing through a conduit (310) passes through detection electronics (330, 320, and 340) producing signals indicative of the fluid flow in sensor electronic control means (350).
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| 申请公布号 |
KR20050026393(A) |
申请公布日期 |
2005.03.15 |
| 申请号 |
KR20047019027 |
申请日期 |
2004.11.24 |
| 申请人 |
MYKROLIS CORPORATION |
发明人 |
LU, SHILIANG;TISON, STUART, A. |
| 分类号 |
G01F15/02;G01F25/00;(IPC1-7):G01F15/02 |
主分类号 |
G01F15/02 |
| 代理机构 |
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