| 摘要 |
PURPOSE: A substrate treating apparatus for manufacturing a flat display device is provided to load a substrate on a substrate supporting part accurately and safely, thereby improving reliability of manufacturing process, by using a substrate aligning unit with a bracket element holding the substrate. CONSTITUTION: A substrate treating apparatus comprises a process chamber, a substrate loader(100), and a substrate aligning unit(40). The substrate loader is located in the process chamber. The substrate is loaded on the substrate loader. The substrate aligning unit aligns the substrate to position the substrate at accurate position. The substrate aligning unit includes at least one mobile alignment element(400) installed on the substrate loader. The mobile alignment element has a bracket element(420), an aligner(410), and a driving rod(440). The aligner has the first rod and the second rod perpendicular to the first rod. The aligner is coupled to the bracket element at a crossing region of the first rod and the second rod. The driving rod is coupled to the bracket element, and moves in a straight line.
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