发明名称 Patterned functionalized silicon surfaces
摘要 The present invention provides a method for preparing a silicon substrate and a silicon substrate having a silicon surface comprising a pattern of covalently bound monolayers. Each of the monolayers comprises an alkyne, wherein at least a portion of each monolayer is no more than about 5 molecules of the alkyne wide.
申请公布号 US2005054215(A1) 申请公布日期 2005.03.10
申请号 US20040887792 申请日期 2004.07.09
申请人 BURIAK JILLIAN M.;HURLEY PATRICK T. 发明人 BURIAK JILLIAN M.;HURLEY PATRICK T.
分类号 G01Q10/04;H01L21/306;H01L21/469;(IPC1-7):H01L21/469 主分类号 G01Q10/04
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