| 摘要 |
To provide a heater for an inkjet printer head which consumes low power or has a long service life and a high printing resolution, and a method for production thereof. A heater layer 24 covers a heater locating section 22a of a base layer 22 and a wiring layer 26. The heater layer 24 is formed of a tantalum silicon oxide (TaSiO2) and thus has a large sheet resistance. Thus, predetermined heat can be produced on a small current. Also, since the heater layer 24 does not have to be thin, the service life of the device can be extended. In addition, the area of a heater section 24a can be reduced.
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