发明名称 ELECTROLYTIC PROCESSING DEVICE AND ELECTROLYTIC PROCESSING METHOD
摘要 PROBLEM TO BE SOLVED: To regenerate an ion exchange body by improving the regenerating rate of the exchange capacity without exerting adverse effects on the throughput of the device. SOLUTION: The electrolytic processing device is provided with a holding part 32 of holding a work, electrodes 56 and 66, contact members 58 and 68 and exhaust parts 64 and 74 of exhausting metallic ions taken from the work to the contact members 58 and 68 under the processing, and has an electrode 34 for subjecting the work to processing while approaching or coming in contact with the work held by the holding part in the presence of a liquid, and a regeneration dummy electrode 84 freely approaching or coming in contact with the contact members 58 and 68. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005060732(A) 申请公布日期 2005.03.10
申请号 JP20030207200 申请日期 2003.08.11
申请人 EBARA CORP 发明人 YASUDA HOZUMI;NOMICHI IKUTARO;HIROKAWA KAZUTO;IIIZUMI TAKESHI;OBATA ITSUKI
分类号 C25F3/12;C25F7/00;H01L21/3205;(IPC1-7):C25F3/12;H01L21/320 主分类号 C25F3/12
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