| 摘要 |
PROBLEM TO BE SOLVED: To provide a rolling bearing which can satisfy non-magnetic property and high corrosion resistance. SOLUTION: The rolling bearing comprises at least an outer race 1, an inner race 2, and a plurality of rolling elements 3 arranged between the outer race 1 and the inner race 2. The outer race 1 and the inner race 2 are made of an aluminum alloy respectively, and are treated by the hard alumite treatment (anodic oxidation treatment). The rolling elements are made of ceramics. The rolling bearing is installed in the apparatus used in a magnetic environment and a corrosive environment, such as a semiconductor manufacturing apparatus. Further, the hardness of the hard alumite treatment layer is set to be at least 200 HV, because the hardness lower than a certain level causes early damage and may not satisfy required functions. COPYRIGHT: (C)2005,JPO&NCIPI
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