发明名称 Method and apparatus for splitting semiconductor wafer
摘要 A method of dividing a semiconductor wafer having circuits formed in a plurality of areas defined by streets arranged on the front surface in a lattice form along the streets, comprising the step of detecting the streets from the back surface of the semiconductor wafer and the step of cutting the semiconductor wafer along the streets detected in the street detection step by applying a laser beam to the back surface of the semiconductor wafer along the streets.
申请公布号 US2005054179(A1) 申请公布日期 2005.03.10
申请号 US20040485776 申请日期 2004.02.04
申请人 NAGAI YUSUKE 发明人 NAGAI YUSUKE
分类号 B23K26/00;B23K26/04;B23K26/40;B23K101/40;H01L21/00;H01L21/301;H01L21/78;(IPC1-7):H01L21/301;H01L21/46;B44C1/22;C03C25/68;C23F1/00;C03C15/00 主分类号 B23K26/00
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