| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-contact guide having simple technical construction for guiding a movable body along a guiding body. SOLUTION: The guide comprises the movable body having a sliding face, the guide body having a guide face opposed to the sliding face, and filling liquid for filling a gap between the sliding face and the guide face. By selecting affinity to the filling liquid between the sliding face and the guide face, the filling liquid permeates into the gap between the sliding face and the guide face with surface tension to fill the gap. Thus, the sliding face and the guide face are kept in non-contact with each other. The internal pressure of the filling liquid is changed against a change in distance between the sliding face and the guide face, and so the movable body is constrained perpendicular to the guide face. The movable body constrained perpendicular to the guide face has motion with extremely low friction in a direction parallel to the guide face. At this time, it has high positioning resolution with no static friction because it is constrained via the filling liquid. COPYRIGHT: (C)2005,JPO&NCIPI
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