| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent improper conversion processing from being carried out in detecting position of an object on the basis of a detection signal when temperature is changed. <P>SOLUTION: Provided are a position detecting sensor (7) which outputs a plurality of detection signals corresponding to a positional shift of the object (4), a converting means (11) of performing specified conversion processing for at least one detection signal among the plurality of detection signals and outputting the conversion-processed signal, an arithmetic means of calculating the position of the object according to the output of the converting means, and a temperature sensor (2) which detects temperature. The converting means performs the conversion processing according to the 1st detection signal outputted from the position detecting sensor and inhibits conversion processing based upon a 2nd detection signal, which is a detection signal outputted from the position detecting sensor when the difference between the temperature detected in the 1st timing from the temperature detecting sensor and the temperature detected in 2nd timing is larger than a specified value. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
