发明名称
摘要 <p>A semiconductor wafer (10), a method of providing information on a semiconductor wafer (10), a system of semiconductor wafer (10) and reading means, and a method of reading information from a semiconductor wafer (10) are provided. The invention is characterized by magnetic means (14) as information carrier and the respective magnetic sensors (26) to read such information.</p>
申请公布号 JP2005507158(A) 申请公布日期 2005.03.10
申请号 JP20030533207 申请日期 2002.09.12
申请人 发明人
分类号 G06K19/06;H01L21/00;H01L21/677;H01L23/544;(IPC1-7):H01L21/68 主分类号 G06K19/06
代理机构 代理人
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