| 摘要 |
PROBLEM TO BE SOLVED: To obtain a tunable optical filter having structure with a countermeasure taken against air damping, and to obtain a method of manufacturing the tunable optical filter. SOLUTION: In the tunable optical filter, a movable part 2 having a movable body 21a which has, on one surface thereof, a high reflection film 23 reflecting a light beam having a certain wavelength is formed, and which is driven in the direction perpendicular to the surface, a driving electrode part 1 having a driving electrode 12 which faces the movable body 21a at a predetermined electrostatic gap EG, and an optical gap part 3 having a high reflection film 32 which faces the high reflection film 23 at a predetermined optical gap OG, are mutually bonded. A damping prevention hole 18 for preventing an air damping is provided through a space formed by the electrostatic gap EG and the optical gap OG, and an external part. COPYRIGHT: (C)2005,JPO&NCIPI
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