Photoelectric conversion apparatus and method of manufacturing the same

摘要

A manufacturing method for a photoelectric conversion apparatus having a two dimensional photoreceiving surface which includes a plurality of semiconductor element substrates on which a plurality of photoreceiving sections of photoelectric conversion elements are arranged two dimensionally; a base on which said plurality of semiconductor element substrates are arranged fixedly; and an adhesive for fixing said plurality of semiconductor element substrates to said base, wherein said adhesive has a variation in a thickness thereof so as to align in the same plane photoreceiving surface side levels of said photoelectric conversion elements of said semiconductor element substrates, which comprises the steps of:
(a) fixing said plurality of semiconductor element substrates so as to align, with a reference plane, sides on which said photoreceiving sections are formed;
(b) disposing, on said base through said adhesive, said semiconductor element substrates at a side opposite to the side on which said photoreceiving sections are formed; and
(c) hardening said adhesive while maintaining a space between said reference plane and said base, wherein a first elastic modulus of said adhesive after hardening of a section at a side of which said plurality of semiconductor substrates are adjacent to each other is different from a second elastic modulus of said adhesive at a second section distant from the section at which said semiconductor substrates are adjacent to each other.