发明名称 TARGETS WITH HIGH PASS-THROUGH-FLUX FOR MAGNETIC MATERIAL SPUTTERING, METHOD OF MANUFACTURE AND HARD DISK OBTAINABLE THEREOF
摘要 <p>A target for a deposition apparatus is formed by blending at least two different types of powders together and consolidating the powders with a powder metallurgy process to form a billet. The target is then formed from the billet. The target includes a first material phase having a first PTF and a second material phase having a second PTF higher than the first PTF. The second PTF is also higher than a PTF of a material having the same chemistry as the target.</p>
申请公布号 EP1511878(A2) 申请公布日期 2005.03.09
申请号 EP20030757262 申请日期 2003.05.14
申请人 HERAEUS, INC. 发明人 ZHANG, WENJUN;KUNKEL, BERND;DEODUTT, ANAND;BARTHOLOMEUCZ, MICHAEL
分类号 B22F1/00;C23C14/34;G11B5/851;(IPC1-7):C23C14/34;G11B5/64;H01J37/34;G11B5/84;C23C14/35 主分类号 B22F1/00
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