发明名称 |
Device for measuring substrate temperature has polygonal stop with essentially straight edges between substrate, radiation detector to restrict detector field of view |
摘要 |
The device has at least one radiation detector for measuring the radiation emitted by the substrate and a stop (19) for restricting the field of view of the detector arranged between the substrate and detector, whereby the edges (20) of the stop are essentially straight. A polygonal stop is used.
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申请公布号 |
DE19905524(B4) |
申请公布日期 |
2005.03.03 |
申请号 |
DE19991005524 |
申请日期 |
1999.02.10 |
申请人 |
STEAG RTP SYSTEMS GMBH |
发明人 |
HAUF, MARKUS |
分类号 |
G01J5/00;G01J5/08;(IPC1-7):G01J5/08;H01L21/66 |
主分类号 |
G01J5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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