发明名称 COMPOSITE COATING FILM, AND ITS PRODUCTION METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a composite coating film having electrical insulating properties and also high thermal conductivity, and to provide its production method. <P>SOLUTION: The composite coating film 1 is formed on a substrate 2, has electrical insulating properties and high thermal conductivity. The composite coating film 1 includes a first protective layer 11 consisting of an inorganic material and formed on the substrate 2 and a second protective layer 12 formed so as to cover defective parts 111 generated at least on the first protective layer 11. At the time of producing the composite coating film 1, the first protective layer 11 is uniformly formed on the substrate 2 by a PVD (Physical Vapor Deposition) method or a CVD (Chemical Vapor Deposition) method. Next, the second protective layer 12 is formed by an electrodeposition method so that at least the defective parts 111 generated on the first protective layer 11 are covered. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005054248(A) 申请公布日期 2005.03.03
申请号 JP20030287398 申请日期 2003.08.06
申请人 DENSO CORP 发明人 SUGAWARA HIROYOSHI;OCHI FUMIO;MINAMIGUCHI TSUNEAKI;IBE MITSUTAKA
分类号 B32B9/00;C23C14/06;C23C16/22;C23C26/00;C23C28/00;H01L23/473;(IPC1-7):C23C28/00 主分类号 B32B9/00
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