发明名称 Junction substrate and method of bonding substrates together
摘要 A junction substrate includes a first substrate, a buffer film formed on one surface of the first substrate, a metal containing film formed on the buffer film and having a lower resistance than the buffer film, and a second substrate bonded to the other surface of the first substrate.
申请公布号 US2005046007(A1) 申请公布日期 2005.03.03
申请号 US20040916203 申请日期 2004.08.11
申请人 CASIO COMPUTER CO., LTD. 发明人 NAKAMURA OSAMU;TAKEYAMA KEISHI;TERAZAKI TSUTOMU
分类号 G01N37/00;B01J19/00;B01L3/00;C01B3/32;C03C17/22;C03C17/34;C03C27/00;C03C27/10;(IPC1-7):H01L21/48;H01L23/52 主分类号 G01N37/00
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