ELECTRODE ARRANGEMENT, AND USE THEREOF

摘要

Disclosed is an electrode arrangement for removing charged particles, in which an optical element (1) is connected as a first electrode (10) that emits photoinduced secondary electrons when impinged with EUV radiation and/or soft x-rays. A second electrode (20), at least the surface (1a) of which is made of at least one inert material, is disposed at a distance from the irradiated surface of the optical element. Inert materials have the advantage of allowing the effectiveness of the electrode to remain constant while preventing material from being knocked out of the electron surface during the removal of charged particles.