| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for efficiently preparing B,B',B''-trichloro-N,N',N''-trialkylborazine. SOLUTION: In the preparation method of B,B',B''-trichloro-N,N',N''-trialkylborazine, boron trichloride is reacted with a monoalkyl ammonium halide in the presence of a trialkylamine. The borazine ring-containing compound prepared through the method is a low-dielectric material and is used for forming e.g. an interlayer insulating film for a semiconductor, a barrier metal layer or an etch stopper layer. COPYRIGHT: (C)2005,JPO&NCIPI
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