发明名称 |
Interferometric modulation pixels and manufacturing method thereof |
摘要 |
A protection layer covers the cavity-side surface of a bottom electrode of a interferometric modulation pixel. Consequently, the protective layer protects the surface of the bottom electrode while a sacrificial layer between the bottom electrode and the top electrode is being etched. Thus, the distance between the bottom electrode and the top electrode is maintained, thereby ensuring that only the light with desired wavelengths is reflected by the interferometric modulation pixel.
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申请公布号 |
US2005046923(A1) |
申请公布日期 |
2005.03.03 |
申请号 |
US20040815947 |
申请日期 |
2004.04.02 |
申请人 |
PRIME VIEW INTERNATIONAL CO., LTD. |
发明人 |
LIN WEN-JIAN;TSAI HSIUNG-KUANG |
分类号 |
G02B26/00;G02F1/1335;G02F1/21;(IPC1-7):G02F1/133 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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