| 摘要 |
PROBLEM TO BE SOLVED: To provide a strain quantity measuring device capable of forming an element for measuring the strain quantity on an LSI, and measuring stably the strain quantity having many degrees of freedom. SOLUTION: An elastic body 300 is a hemispheric flexible body using a material having a high permittivity, and is in contact with a communication element 200 formed by integrating communication circuits. The elastic body 300 is deformed corresponding to an external force, and resultantly the capacitance is changed. Electrodes 302 are arranged on the upper surface of the communication element 200 so as to be in contact with the elastic body 300. Voltages having different values are applied to one or two designated electrodes from among the electrodes 302 and one or two electrodes from among residual electrodes, and a voltage between electrodes to which the voltages are applied is measured by a measuring function provided in the communication element 200, and the capacitance between the electrodes or the strain quantity of the elastic body 300 is measured from the measured voltage. A communication terminal 304 is arranged on the upper surface of the communication element 200 so as to be out of contact with the elastic body 300. COPYRIGHT: (C)2005,JPO&NCIPI |
