REACTION CHAMBER, HIGH-TEMPERATURE TRAP, AND TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a reaction chamber capable of maintaining the reaction rate of a work when a high-temperature trap is disposed in the reaction chamber. SOLUTION: A counterflow preventive device to separate a treatment space with a work disposed therein from a trap space with a high-temperature trap disposed therein is provided in a reaction chamber. COPYRIGHT: (C)2005,JPO&NCIPI