ELECTROSTATIC ACTUATOR, SHUTTER DEVICE, IMAGING MODULE, AND CAMERA

摘要

A shutter device comprising a fixing member (1) where a plurality of electrodes (4) are arranged on its surface, a light transmitting region provided on the fixing member, a light shielding member (2) having a plurality of electret parts (5) and movable between positions covering and opening the light transmitting region, and a drive circuit (10) for applying a periodic voltage to an electrode on the fixing member in order to drive the light shielding member by generating an electrostatic force acting on the electret part of the light shielding member.