METHOD AND DEVICE FOR REMOVING ORGANIC SUBSTANCE

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for effectively removing organic substances in the device, in order to overcome problems that: the organic substances inside the device are polluted with the organic substances such as the packing material of a component and an organic solvent used in the working of the component after the completion of assembling of the device like a clean oven; the organic substances pollute the surface of a member treated in the thermal treatment of the clean oven; the inside of the device is polluted with the organic substances by repetitive uses, and the surface of the treated member is polluted with the organic substances and baking for a long time is required at a use temperature or higher. SOLUTION: Gas including clean ozone with a high concentration and a large flow rate is circulated in the device at a temperature lower than the use temperature of the device such as the clean oven. The organic substances inside the device can be removed in a short time at the use temperature or lower. Thus, the pollution of the organic substances on the surface of the member to be treated can be reduced. COPYRIGHT: (C)2005,JPO&NCIPI