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发明名称
Verfahren zur Erzielung einer optischen Ausbeute bei der Herstellung von integrierten Schaltungen
摘要
申请公布号
DE1957788(A1)
申请公布日期
1970.05.27
申请号
DE19691957788
申请日期
1969.11.18
申请人
INTERNATIONAL BUSINESS MACHINES CORP.
发明人
HARRY DEPUY,ARTHUR;NORMAN KUSCHEL,WILLIAM;AGUSTA,BENJAMIN;JIT SAHNI,RAVINDER
分类号
D06F15/00;H01J9/233;H01L21/00;H01L21/32;H01L21/82
主分类号
D06F15/00
代理机构
代理人
主权项
地址
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