FULLERENE DERIVATIVE AND FULLERENE-COMPOSITE RESIST

摘要

PROBLEM TO BE SOLVED: To provide a fullerene derivative which shows a high solubility to a solvent, especially to a solvent normally used for dissolving a resist composition.

SOLUTION: The fullerene derivative is represented by formula (1) (wherein F is a fullerene group represented by the formula: C30+2m(wherein m is 3-20); R1and R2are each independently an alkyl group, an aryl group, an aryl-substituted alkyl group or an alkyl-substituted aryl group; and n is an integer of 1-8).

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