发明名称 MULTI-HIERARCHICAL DATA BASE FOR PARAMETER EXPRESSING IMPURITY CONCENTRATION DISTRIBUTION PRODUCED BY ION IMPLANTATION AND ITS DATA EXTRACTING PROGRAM
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a multi-hierarchical data base which is made to be configured and maintained easily and to extract data easily from the data base by simplifying the data base. <P>SOLUTION: The multi-hierarchical data base, in which a plurality of data is stored correspondingly to the values of a plurality of categories and from which the data can be extracted by a computer, has a plurality of elements respectively having the names and values of the categories and configured in a multi-hierarchy by correlating the categories to layers. The multi-hierarchy is configured by correlating at least a plurality of lower-layer elements with an elements of upper layers, and in addition, by correlating data with the elements of the lowermost layer. Then a plurality of elements of a second layer which is lower than a first layer is correlated with the first element of a first layer and a plurality of elements of a third layer which is lower than the second layer is directly correlated with the second element of the first layer. Since the multi-hierarchy is configured by omitting the elements of the second layer when the data do not rely upon the values of the elements of the second layer with respect to the values of the second elements of the first layer, it becomes unnecessary to uselessly have identical data groups in a duplicated state. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005056876(A) 申请公布日期 2005.03.03
申请号 JP20030205437 申请日期 2003.08.01
申请人 FUJITSU LTD 发明人 SUZUKI KUNIHIRO;KOJIMA SHUICHI
分类号 G06F12/00;G06F19/00;H01L21/00;H01L21/265;(IPC1-7):H01L21/00 主分类号 G06F12/00
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