| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet device which secures a high hitting precision by preventing generation of an air flow between a head nozzle face and a discharge object as much as possible. SOLUTION: An inkjet head 51 is loaded and fixed by a headθstage 47. A nozzle face 52 is spaced by a distance of 1.0 mm to a surface of a glass substrate 38 sucked by a chuck 37. A wind shield member 1 is bonded to an electric substrate at a nearly even face with the nozzle face 52. The wind shield member 1 is set to have a plate enclosure protruded by 0.9 mm from the nozzle face 52, and is kept in a positional relation to be proximate to the surface of the glass substrate 38 without contacting the surface. COPYRIGHT: (C)2005,JPO&NCIPI |
