发明名称 System-on-chip including DRAM & analog device for improving DRAM capacitance and method for fabricating the same
摘要 Provided is an invention related to a SOC containing a DRAM and an analog device for increasing a capacitance of a capacitor in SOC and a method of fabricating the SOC. Two conductive layers are used for lower electrode in a capacitor for unit cells of the DRAM, and the whole surface of the upper electrode is capped with a second dielectric layer to maximally increase in the contact surface between the dielectric layer and the upper and lower electrodes.
申请公布号 US2005048719(A1) 申请公布日期 2005.03.03
申请号 US20040922439 申请日期 2004.08.19
申请人 CHANG DONG-RYUL 发明人 CHANG DONG-RYUL
分类号 H01L27/10;H01L21/02;H01L21/8242;H01L27/105;(IPC1-7):H01L21/824 主分类号 H01L27/10
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