发明名称 |
Diffractive optical element, illumination system comprising the same, and method of manufacturing semiconductor device using illumination system |
摘要 |
An illumination system including a diffractive optical element (DOE) having an uneven surface that produces an illumination shape. The DOE comprising an uneven surface that produces a multipole illumination shape having angular scope element, wherein the angular scope element is a function of a radius and an angle of the produced multipole illumination shape, and wherein a position of the poles and sizes of the poles in an angular scope vary with a radial scope used in producing the multipole illumination shape, and a method of manufacturing a semiconductor device using the system.
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申请公布号 |
US2005046945(A1) |
申请公布日期 |
2005.03.03 |
申请号 |
US20040874786 |
申请日期 |
2004.06.22 |
申请人 |
HWANG CHAN |
发明人 |
HWANG CHAN |
分类号 |
G02B5/18;G02B5/32;G02B27/09;G02B27/44;G03F7/20;H01L21/027;(IPC1-7):G03H1/00 |
主分类号 |
G02B5/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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