| 摘要 |
PROBLEM TO BE SOLVED: To provide a vaporizer which is excellent in heat efficiency for efficiently transferring heat to fine grains of a liquid material. SOLUTION: The vaporizer 1 atomizes a liquid material M composed of a liquid organic metal or an organic-metal solution toward a vaporization surface S1 inside a vaporization chamber 30, which is kept at a high temperature, to vaporize the atomized fine grains of the liquid material M, and supplies the material gas V generated by the vaporization to a CVD film-forming apparatus. The vaporization surface S1 is made of a material having higher thermal conductivity than that of stainless steel. COPYRIGHT: (C)2005,JPO&NCIPI
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