COPPER POLISHING CLEANING SOLUTION,申请号EP20020786962-传众专利搜索

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发明名称	COPPER POLISHING CLEANING SOLUTION
摘要
申请公布号	EP1472018(A4)	申请公布日期	2005.03.02
申请号	EP20020786962	申请日期	2002.12.06
申请人	ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.	发明人	SO, JOSEPH, K.;THOMAS, TERENCE, M.
分类号	B08B3/08;B24B53/007;C11D3/30;C11D3/33;C11D7/32;C11D11/00;H01L21/02;H01L21/304;H01L21/321;(IPC1-7):B08B3/04;B08B6/00;H01L21/306	主分类号	B08B3/08
代理机构		代理人
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